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AXRD HR

Superior High-Resolution X-ray Diffractometers for Thin Films and Single-Crystal Materials

The AXRD HR features an innovative goniometer designed to provide the utmost in accuracy and precision. Utilizing the latest advancements in motor and encoder technology, this system has the capabilities necessary to perform high-resolution experiments on your epitaxial thin films, multilayer coatings, and single crystals.

With this top-of-the-line system, you can perform x-ray reflectivity (XRR) to characterize the physical surface properties of your thin films, multilayer coatings, and interfaces. High-resolution rocking curves can be used to analyze epitaxial single-crystal films and determine the crystalline perfection of bulk single crystals. Finally, reciprocal space maps provide valuable information about epitaxial thin films and make it possible to analyze strained films.

X-RAY REFLECTIVITY (XRR)

Characterize the physical surface properties of your thin films, multilayer coatings, and interfaces.

Determine the following information:

  1. Layer thickness
  2. Surface and interface roughness
  3. Density
  4. Chemical composition
  5. Dislocation density

Amorphous, polycrystalline, and single-crystal layers can all be analyzed.

ROCKING CURVES

High-resolution rocking curves can be used to analyze epitaxial single-crystal films and determine the crystalline perfection of bulk single crystals.

Determine the following information:           

  1. Layer composition and thickness
  2. Mismatch, relaxation (lattice strain)
  3. Layer tilt, curvature, and misorientation
  4. Mosaicity
  5. Dislocation density

RECIPROCAL SPACE MAPPING

This high-resolution technique provides the most information about epitaxial thin films and is necessary to analyze strained films.

Determine the following information:

  1. Separate Bragg peak displacement effects to enable accurate determination of strain, composition, lattice parameters, and layer thickness
  2. Distinguish between strain and compositional changes
  3. Distinguish between broadening due to mosaic spread or curvature