Product Details


Lumina AT1 System

The Lumina laser optical scanning systems enable full-surface defect detection, mapping, and classification on transparent, translucent, and opaque substrates of any shape.

The innovative AT1 technology with its unmatched thin film defect detection capability enhances the yield control and management for various processes, notably in the rapidly growing glass market.

The AT1 system is capable of scanning any flat shape less than or equal to 300 mm x 300 mm.

  • Resilient: Capable of scanning fragile and thin samples
  • Adaptable: Scans transparent (glass), semiconductor, or metal substrates.
  • Efficient: Full-surface scan of 150 mm wafer in 3 minutes.
  • Sensitive: 70 nm PSL sensitivity on silicon and 150 nm PSL sensitivity on glass

Instrument Specifications

  • Temperature: 18 – 30 °C
  • Voltage: 120/230 VAC
  • Current: 6 A/4A
  • Weight: 815 lbs/370 kg
  • Dimensions: 880 x 2005 x 743 mm